单晶硅压力变送器的原理
单晶硅压力变送器的原理
The principle of monocrystalline silicon pressure transmitter
压阻式压力传感器利用单晶硅的压阻效应而组成。采用单晶硅片为弹性元件,当压力发生变化时,单晶硅产生应变,使直接扩散在上面的应变电阻产生与被测压力成比例的变化,再由桥式电路获得相应的电压输出信号。
Piezoresistive pressure sensor is composed of piezoresistive effect of monocrystalline silicon. When the pressure changes, the monocrystalline silicon produces strain, which makes the strain resistance directly spread on it change in proportion to the measured pressure, and then the corresponding voltage output signal is obtained by the bridge circuit.