电容式压力传感器属于极距变化型电容式传感器
电容式压力传感器是一种利用电容作为敏感元件,将被测压力转换成电容值改变的压力传感器。这种压力传感器一般采用圆形金属薄膜或镀金属薄膜作为电容器的一个电极,当薄膜感受压力而变形时,薄膜与固定电极之间形成的电容量发生变化,通过测量电路即可输出与电压成一定关系的电信号。电容式压力传感器属于极距变化型电容式传感器,可分为单电容式压力传感器和差动电容式压力传感器。
The capacitive pressure sensor is a kind of pressure sensor which uses the capacitance as the sensitive element to change the measured pressure into the capacitance value. This kind of pressure sensor generally uses circular metal film or plated metal film as one of the electrodes of the capacitor. When the film feels the pressure and deforms, the capacitance formed between the film and the fixed electrode changes. Through the measuring circuit, the electrical signal which has a certain relationship with the voltage can be output. Capacitive pressure sensor belongs to the type of capacitance sensor with variable polar distance, which can be divided into single capacitance pressure sensor and differential capacitance pressure sensor.