| 扩散硅压力变送器 |
| 添加时间：2019/11/25 14:00:40 浏览次数： |
| 扩散硅压力变送器，广泛应用于工业自动化设备、石油、化工、冶金、电力等控制平台，它是利用压阻效应原理，采用集成工艺技术经过掺杂、扩散，沿单晶硅片上的特点晶向，制成应变电阻，组成惠斯凳电桥，利用硅材料的弹性力学特性，在同一切硅材料上进行各向异性微加工，就制成了一个集力敏与力电转换检验于一体的扩散硅传感器。 Diffused silicon pressure transmitter is widely used in industrial automation equipment, petroleum, chemical industry, metallurgy, electric power and other control platforms. It uses piezoresistive effect principle, adopts integrated process technology, through doping and diffusion, along the characteristic crystal direction of monocrystalline silicon chip, to make strain resistance, and forms a Wheatstone bridge. It uses the elastic mechanical properties of silicon material, and is carried out on the same silicon material An anisotropic micromachining method is proposed to fabricate a diffused silicon sensor, which combines force sensing and electromechanical conversion testing. |
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